Global Lithography Metrology Equipment Market Size, Share, Trends, Industry Growth by Technology (CD-SEM, OCD, Overlay Control, Others), by Product (Chemical Control Equipment, Gas Control Equipment, Others), by Application, by Region, and Forecast to 2030

Report ID: RC157863 | Report Format: PDF + Excel | Starting Price: 3600/- USD |

The global lithography metrology equipment market size is anticipated to grow at a significant CAGR of around 7% during the forecast period from 2023 to 2030. The market is influenced by various factors driving its growth. As semiconductor technology advances to smaller nodes, precise measurements become crucial, spurring demand for advanced metrology tools. Complex semiconductor designs, such as FinFETs and 3D transistors, require accurate verification, enhancing the role of metrology equipment. Achieving higher yield and product quality remains essential, with metrology aiding in defect detection and process improvement. The rise of IoT and AI fuels demand for reliable chips, supported by precise metrology. Miniaturization in consumer electronics relies on accurate feature sizing ensured by metrology. Evolving packaging technologies like 3D ICs require stringent alignment, boosting metrology importance. High-performance computing demands uniform and efficient chips, emphasizing metrology’s role. Memory advancements like 3D NAND are validated by metrology. Government investments, competition, and supply chain resilience further drive the market, making metrology pivotal in ensuring accurate and efficient semiconductor manufacturing.

Market Snapshot:

Benchmark Year 2022
Market Size $ x.x Bn lock
Market Growth (CAGR) ~ 7% (2023-2030)
Largest Market Share North America
Analysis Period 2020-2030
Market Players ASML Holdings, Advantest, Applied Materials, Hitachi High-Technologies, and KLA-Tencor

Market Drivers:

Technological Advancements in Semiconductor Manufacturing: The semiconductor industry is in a constant state of evolution, with manufacturers pushing the limits of miniaturization and performance. As semiconductor nodes shrink to smaller dimensions, such as 7nm, 5nm, and beyond, the intricacies of manufacturing processes become more demanding. This necessitates the use of advanced metrology equipment to measure, analyze, and verify nanoscale features with unprecedented precision. These tools play a pivotal role in ensuring that the intricate patterns and structures are accurately reproduced on semiconductor wafers, guaranteeing the high quality of the final products.

Increasing Complexity of Semiconductor Devices: Modern semiconductor devices are far more intricate than their predecessors. Designs now incorporate complex architectures like FinFETs and 3D transistors, which enable better performance and power efficiency. However, these intricate designs require meticulous verification of their dimensional accuracy and alignment. Metrology equipment provides a comprehensive view of these complex structures, helping manufacturers detect any deviations or irregularities early in the production process, thus ensuring optimal functionality and yield.

Demand for Higher Yield and Quality: In the competitive landscape of semiconductor manufacturing, achieving higher yield and product quality is paramount. Metrology equipment serves as a critical tool in achieving these objectives. By identifying defects, process variations, and deviations in real time, manufacturers can swiftly implement corrective measures. This proactive approach leads to improved yields, reduced production costs, and the delivery of high-quality chips to the market, satisfying both manufacturers and end-users.

Rapid Growth of IoT and AI: The rapid proliferation of the Internet of Things (IoT) and artificial intelligence (AI) technologies has spurred a surge in demand for high-performance and energy-efficient semiconductor components. These applications require chips with precise features and reliable performance. Metrology equipment ensures that these chips meet the stringent requirements of IoT and AI applications, enabling the seamless integration of smart devices and AI-driven solutions into various industries.

Escalating Need for Miniaturization: The consumer electronics market continues to demand smaller, more powerful, and energy-efficient devices. Achieving this level of miniaturization requires maintaining precise feature sizes and uniformity across semiconductor wafers. Metrology equipment plays a vital role in characterizing and verifying the dimensional accuracy of these minute features, contributing to the successful realization of smaller and more powerful electronic devices.

Evolution of Advanced Packaging Technologies: The semiconductor industry is witnessing a paradigm shift in packaging technologies, moving towards advanced solutions like 3D ICs and system-in-package (SiP) configurations. These packaging technologies demand exceptional alignment accuracy and bonding integrity. Metrology equipment ensures that the intricate interconnects and packaging structures meet the strict requirements of reliability, performance, and thermal management.

Rising Demand for High-Performance Computing (HPC): High-performance computing applications, including data centers and AI processing, rely on chips that deliver exceptional computational power while maintaining energy efficiency. Metrology equipment plays a crucial role in ensuring the uniformity, precision, and reliability of these high-performance chips, thus meeting the increasing demands of HPC-driven industries.

Increasing Complexity in Memory Manufacturing: The memory industry is experiencing a transformative phase with the advent of technologies like 3D NAND and advanced DRAM architectures. These innovations enable higher storage capacities and data transfer rates. Metrology tools are indispensable in characterizing and optimizing the complex memory structures, ensuring the production of reliable and high-performance memory components.

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Market Insights:

The global lithography metrology equipment market is bifurcated into technology, product type, application, and geography. On the basis of application, the market is further segmented into Quality Control and Inspection, Reverse Engineering, Virtual Simulation, and Others. The quality control and inspection emerge as the dominant and pivotal category by application segment and expected to hold the largest revenue share of around 40% of the market by the end of the analysis period. This dominance is underscored by the critical role quality control and inspection play in the semiconductor manufacturing process. Lithography metrology equipment, with its precision measurement capabilities, is instrumental in ensuring that semiconductor components adhere to stringent specifications and industry standards. By accurately measuring critical dimensions, overlay accuracy, and identifying defects, this segment ensures the reliability and consistency of produced components. Quality control not only enhances product reliability but also has far-reaching implications for manufacturing efficiency. It leads to higher yields by identifying defects early, thus reducing production costs and minimizing the need for rework. Moreover, the reliability achieved through quality control contributes to customer satisfaction and compliance with regulatory standards, particularly in industries like automotive and healthcare.

Quality Control and Inspection: Quality control and inspection are fundamental aspects of semiconductor manufacturing. Lithography metrology equipment plays a central role in ensuring the quality and reliability of semiconductor products. These tools are used to measure critical dimensions, identify defects, and monitor process variations. By providing real-time feedback on the manufacturing process, metrology equipment helps manufacturers maintain consistent product quality, optimize production yields, and minimize defects, ultimately enhancing customer satisfaction and reducing production costs.

Reverse Engineering: Reverse engineering involves analyzing and deconstructing existing products or components to understand their design, structure, and functionality. In the context of semiconductor manufacturing, lithography metrology equipment assists in reverse engineering by accurately measuring the dimensions and characteristics of existing semiconductor components. This information is crucial for manufacturers looking to replicate or improve upon existing designs, enabling them to develop innovative solutions and stay competitive in the market.

Virtual Simulation: Virtual simulation involves creating digital models or simulations of physical processes or products. In the semiconductor industry, virtual simulation is essential for predicting how different manufacturing parameters and design changes will impact the final product’s performance. Lithography metrology equipment provides precise measurements and data that feed into these simulations. This data helps manufacturers make informed decisions about process adjustments, design modifications, and overall optimization, reducing the need for costly physical iterations and accelerating time-to-market.

Others: The “Others” category encompasses various applications that fall outside the specific domains of quality control, inspection, reverse engineering, and virtual simulation. This could include activities such as research and development, process development, equipment calibration, and more. In these contexts, lithography metrology equipment aids in obtaining accurate measurements and data, which are essential for making informed decisions, ensuring equipment functionality, and advancing research efforts.

The lithography metrology equipment market research report presents the analysis of each segment from 2020 to 2030 considering 2022 as the base year for the research. The compounded annual growth rate (CAGR) for each respective segment is calculated for the forecast period from 2023 to 2030.

Historical & Forecast Period

  • 2020-21 – Historical Year
  • 2022 – Base Year
  • 2023-2030 – Forecast Period

Market Segmentation:

By Technology:

  • Critical-Dimension Scanning Electron Microscope (CD-SEM)
  • Optical Critical Dimension Metrology (OCD)
  • Overlay Control
  • Others

By Product:

  • Chemical Control Equipment
  • Gas Control Equipment
  • Others

By Application:

  • Quality Control and Inspection
  • Reverse Engineering
  • Virtual Simulation
  • Others

By Region:

  • North America
  • Europe
  • Asia Pacific
  • Latin America
  • Middle East & Africa

Regional Analysis:

Geographically, North America dominated the global lithography metrology equipment market in 2022 and expected to hold the largest revenue share of over 1/3 market share by the end of the analysis period. With a history of technological innovation and a cluster of leading semiconductor companies like Intel, AMD, NVIDIA, and Qualcomm, the region often drives market trends and demands for advanced manufacturing tools. Substantial investments in research and development by governments and private entities foster cutting-edge technologies that necessitate precise metrology equipment. North America’s well-established semiconductor supply chain enhances the demand for accurate measurement tools to ensure the quality and reliability of components. Industries such as AI, cloud computing, data centers, and automotive technology drive demand for high-performance semiconductors, leading to rigorous quality control measures facilitated by metrology equipment. Additionally, stringent regulatory requirements in sectors like healthcare and aerospace further drive the need for precise metrology.

On the other hand, the Asia-Pacific (APAC) region is projected to attain the fastest compound annual growth rate (CAGR) in the lithography metrology equipment market due to several compelling factors. This region boasts a robust semiconductor manufacturing ecosystem, with countries like China, South Korea, Japan, and Taiwan as prominent contributors. Increasing demands for electronics, burgeoning technological innovation, and expanding applications like IoT and AI fuel the demand for advanced semiconductor components. APAC’s cost-effective production capabilities, coupled with favorable government policies and investments, position it as a prime destination for semiconductor manufacturing. This environment fosters a high adoption rate of lithography metrology equipment, resulting in the projected accelerated growth within the APAC market.

Competitive Analysis:

Some of the major market players operating in the global lithography metrology equipment market are ASML Holdings, Advantest, Applied Materials, Hitachi High-Technologies, and KLA-Tencor. These players have a strong presence in the market, with a wide range of products and services. They also have a strong research and development (R&D) focus, which allows them to stay ahead of the competition. The competitive landscape in the lithography metrology equipment market is expected to intensify in the coming years, as new players enter the market and existing players expand their product offerings. The lithography metrology equipment market is driven by technological advancements, as new and improved technologies are being developed to meet the ever-increasing demands of the semiconductor industry. Furthermore, the demand for high-performance semiconductor devices is increasing, which is driving the demand for lithography metrology equipment.

Recent Developments:

  • In 2023, Advantest announced the launch of its new 3D metrology system called the MPT3000. This system is designed to measure the critical dimensions of 3D semiconductor devices.
  • In 2023, Hitachi High-Technologies announced the development of a new overlay metrology system called the IC-M5000. This system is designed to measure the alignment accuracy of semiconductor devices.
  • In 2022, ASML announced the development of a new lithography system called the EUV High NA Scanner. This system is expected to be the first to use high-numerical aperture (NA) lithography, which will allow for the manufacturing of even smaller and more advanced semiconductor devices.
  • In 2022, Applied Materials announced the acquisition of Tokyo Electron Limited’s (TEL) metrology business. This acquisition will allow Applied Materials to expand its portfolio of lithography metrology products and services.
  • In 2022, KLA-Tencor announced the launch of its new pattern inspection system called the Clarity XP. This system is designed to detect defects in semiconductor devices.

Key Companies:

  • ASML Holdings
  • Advantest
  • Applied Materials
  • Hitachi High-Technologies
  • KLA-Tencor
  • LAM Research
  • Plasma-Therm
  • Rudolph Technologies
  • Screen Holding
  • Nanometrics

Key Questions Answered by Lithography Metrology Equipment Market Report

  • Global lithography metrology equipment market forecasts from 2023-2030
  • Regional market forecasts from 2023-2030 covering Asia-Pacific, North America, Europe, Middle East & Africa, and Latin America
  • Country-level forecasts from 2023-2030 covering 15 major countries from the regions as mentioned above
  • Lithography metrology equipment submarket forecasts from 2023-2030 covering the market by technology, product type, application, and geography
  • Various industry models such as SWOT analysis, Value Chain Analysis about the market
  • Analysis of the key factors driving and restraining the growth of the global, regional, and country-level lithography metrology equipment markets from 2023-2030
  • Competitive Landscape and market positioning of top 10 players operating in the market
Table of Content:

1. Preface


1.1. Report Description
1.1.1. Purpose of the Report
1.1.2. Target Audience
1.1.3. USP and Key Offerings
1.2. Research Scope
1.3. Research Methodology
1.3.1. Phase I – Secondary Research
1.3.2. Phase II – Primary Research
1.3.3. Phase III – Expert Panel Review
1.4. Assumptions

 

2. Executive Summary


2.1. Global Lithography Metrology Equipment Market Portraiture
2.2. Global Lithography Metrology Equipment Market, by Technology, 2022 (USD Mn)
2.3. Global Lithography Metrology Equipment Market, by Product, 2022 (USD Mn)
2.4. Global Lithography Metrology Equipment Market, by Application, 2022 (USD Mn)
2.5. Global Lithography Metrology Equipment Market, by Geography, 2022 (USD Mn)

 

3. Global Lithography Metrology Equipment Market Analysis


3.1. Lithography Metrology Equipment Market Overview
3.2. Market Inclination Insights
3.3. Market Dynamics
3.3.1. Drivers
3.3.2. Challenges
3.3.3. Opportunities
3.4. Attractive Investment Proposition
3.5. Competitive Analysis
3.6. Porter’s Five Force Analysis
3.6.1. Bargaining Power of Suppliers
3.6.2. Bargaining Power of Buyers
3.6.3. Threat of New Entrants
3.6.4. Threat of Substitutes
3.6.5. Degree of Competition
3.7. PESTLE Analysis
3.8. COVID-19 Impact Analysis

 

4. Global Lithography Metrology Equipment Market By Technology, 2020 – 2030 (USD Mn)


4.1. Overview
4.2. Critical-Dimension Scanning Electron Microscope (CD-SEM)
4.3. Optical Critical Dimension Metrology (OCD)
4.4. Overlay Control
4.5. Others

 

5. Global Lithography Metrology Equipment Market By Product, 2020 – 2030 (USD Mn)


5.1. Overview
5.2. Chemical Control Equipment
5.3. Gas Control Equipment
5.4. Others

 

6. Global Lithography Metrology Equipment Market By Application, 2020 – 2030 (USD Mn)


6.1. Overview
6.2. Quality Control and Inspection
6.3. Reverse Engineering
6.4. Virtual Simulation
6.5. Others

 

7. North America Lithography Metrology Equipment Market Analysis and Forecast, 2020 – 2030 (USD Mn)


7.1. Overview
7.2. North America Lithography Metrology Equipment Market by Technology, (2020-2030 USD Mn)
7.3. North America Lithography Metrology Equipment Market by Product, (2020-2030 USD Mn)
7.4. North America Lithography Metrology Equipment Market by Application, (2020-2030 USD Mn)
7.5. North America Lithography Metrology Equipment Market by Country, (2020-2030 USD Mn)
7.5.1. U.S.
7.5.1.1. U.S. Lithography Metrology Equipment Market by Technology, (2020-2030 USD Mn)
7.5.1.2. U.S. Lithography Metrology Equipment Market by Product, (2020-2030 USD Mn)
7.5.1.3. U.S. Lithography Metrology Equipment Market by Application, (2020-2030 USD Mn)
7.5.2. Canada
7.5.2.1. Canada Lithography Metrology Equipment Market by Technology, (2020-2030 USD Mn)
7.5.2.2. Canada Lithography Metrology Equipment Market by Product, (2020-2030 USD Mn)
7.5.2.3. Canada Lithography Metrology Equipment Market by Application, (2020-2030 USD Mn)
7.5.3. Mexico
7.5.3.1. Mexico Lithography Metrology Equipment Market by Technology, (2020-2030 USD Mn)
7.5.3.2. Mexico Lithography Metrology Equipment Market by Product, (2020-2030 USD Mn)
7.5.3.3. Mexico Lithography Metrology Equipment Market by Application, (2020-2030 USD Mn)

 

8. Europe Lithography Metrology Equipment Market Analysis and Forecast, 2020 - 2030 (USD Mn)


8.1. Overview
8.2. Europe Lithography Metrology Equipment Market by Technology, (2020-2030 USD Mn)
8.3. Europe Lithography Metrology Equipment Market by Product, (2020-2030 USD Mn)
8.4. Europe Lithography Metrology Equipment Market by Application, (2020-2030 USD Mn)
8.5. Europe Lithography Metrology Equipment Market by Country, (2020-2030 USD Mn)
8.5.1. Germany
8.5.1.1. Germany Lithography Metrology Equipment Market by Technology, (2020-2030 USD Mn)
8.5.1.2. Germany Lithography Metrology Equipment Market by Product, (2020-2030 USD Mn)
8.5.1.3. Germany Lithography Metrology Equipment Market by Application, (2020-2030 USD Mn)
8.5.2. U.K.
8.5.2.1. U.K. Lithography Metrology Equipment Market by Technology, (2020-2030 USD Mn)
8.5.2.2. U.K. Lithography Metrology Equipment Market by Product, (2020-2030 USD Mn)
8.5.2.3. U.K. Lithography Metrology Equipment Market by Application, (2020-2030 USD Mn)
8.5.3. France
8.5.3.1. France Lithography Metrology Equipment Market by Technology, (2020-2030 USD Mn)
8.5.3.2. France Lithography Metrology Equipment Market by Product, (2020-2030 USD Mn)
8.5.3.3. France Lithography Metrology Equipment Market by Application, (2020-2030 USD Mn)
8.5.4. Spain
8.5.4.1. Spain Lithography Metrology Equipment Market by Technology, (2020-2030 USD Mn)
8.5.4.2. Spain Lithography Metrology Equipment Market by Product, (2020-2030 USD Mn)
8.5.4.3. Spain Lithography Metrology Equipment Market by Application, (2020-2030 USD Mn)
8.5.5. Italy
8.5.5.1. Italy Lithography Metrology Equipment Market by Technology, (2020-2030 USD Mn)
8.5.5.2. Italy Lithography Metrology Equipment Market by Product, (2020-2030 USD Mn)
8.5.5.3. Italy Lithography Metrology Equipment Market by Application, (2020-2030 USD Mn)
8.5.6. Rest of Europe
8.5.6.1. Rest of Europe Lithography Metrology Equipment Market by Technology, (2020-2030 USD Mn)
8.5.6.2. Rest of Europe Lithography Metrology Equipment Market by Product, (2020-2030 USD Mn)
8.5.6.3. Rest of Europe Lithography Metrology Equipment Market by Application, (2020-2030 USD Mn)

 

9. Asia Pacific Lithography Metrology Equipment Market Analysis and Forecast, 2020 - 2030 (USD Mn)


9.1. Overview
9.2. Asia Pacific Lithography Metrology Equipment Market by Technology, (2020-2030 USD Mn)
9.3. Asia Pacific Lithography Metrology Equipment Market by Product, (2020-2030 USD Mn)
9.4. Asia Pacific Lithography Metrology Equipment Market by Application, (2020-2030 USD Mn)
9.5. Asia Pacific Lithography Metrology Equipment Market by Country, (2020-2030 USD Mn)
9.5.1. China
9.5.1.1. China Lithography Metrology Equipment Market by Technology, (2020-2030 USD Mn)
9.5.1.2. China Lithography Metrology Equipment Market by Product, (2020-2030 USD Mn)
9.5.1.3. China Lithography Metrology Equipment Market by Application, (2020-2030 USD Mn)
9.5.2. Japan
9.5.2.1. Japan Lithography Metrology Equipment Market by Technology, (2020-2030 USD Mn)
9.5.2.2. Japan Lithography Metrology Equipment Market by Product, (2020-2030 USD Mn)
9.5.2.3. Japan Lithography Metrology Equipment Market by Application, (2020-2030 USD Mn)
9.5.3. India
9.5.3.1. India Lithography Metrology Equipment Market by Technology, (2020-2030 USD Mn)
9.5.3.2. India Lithography Metrology Equipment Market by Product, (2020-2030 USD Mn)
9.5.3.3. India Lithography Metrology Equipment Market by Application, (2020-2030 USD Mn)
9.5.4. South Korea
9.5.4.1. South Korea Lithography Metrology Equipment Market by Technology, (2020-2030 USD Mn)
9.5.4.2. South Korea Lithography Metrology Equipment Market by Product, (2020-2030 USD Mn)
9.5.4.3. South Korea Lithography Metrology Equipment Market by Application, (2020-2030 USD Mn)
9.5.5. Rest of Asia Pacific
9.5.5.1. Rest of Asia Pacific Lithography Metrology Equipment Market by Technology, (2020-2030 USD Mn)
9.5.5.2. Rest of Asia Pacific Lithography Metrology Equipment Market by Product, (2020-2030 USD Mn)
9.5.5.3. Rest of Asia Pacific Lithography Metrology Equipment Market by Application, (2020-2030 USD Mn)

 

10. Latin America (LATAM) Lithography Metrology Equipment Market Analysis and Forecast, 2020 - 2030 (USD Mn)


10.1. Overview
10.2. Latin America Lithography Metrology Equipment Market by Technology, (2020-2030 USD Mn)
10.3. Latin America Lithography Metrology Equipment Market by Product, (2020-2030 USD Mn)
10.4. Latin America Lithography Metrology Equipment Market by Application, (2020-2030 USD Mn)
10.5. Latin America Lithography Metrology Equipment Market by Country, (2020-2030 USD Mn)
10.5.1. Brazil
10.5.1.1. Brazil Lithography Metrology Equipment Market by Technology, (2020-2030 USD Mn)
10.5.1.2. Brazil Lithography Metrology Equipment Market by Product, (2020-2030 USD Mn)
10.5.1.3. Brazil Lithography Metrology Equipment Market by Application, (2020-2030 USD Mn)
10.5.2. Argentina
10.5.2.1. Argentina Lithography Metrology Equipment Market by Technology, (2020-2030 USD Mn)
10.5.2.2. Argentina Lithography Metrology Equipment Market by Product, (2020-2030 USD Mn)
10.5.2.3. Argentina Lithography Metrology Equipment Market by Application, (2020-2030 USD Mn)
10.5.3. Rest of Latin America
10.5.3.1. Rest of Latin America Lithography Metrology Equipment Market by Technology, (2020-2030 USD Mn)
10.5.3.2. Rest of Latin America Lithography Metrology Equipment Market by Product, (2020-2030 USD Mn)
10.5.3.3. Rest of Latin America Lithography Metrology Equipment Market by Application, (2020-2030 USD Mn)

 

11. Middle East and Africa Lithography Metrology Equipment Market Analysis and Forecast, 2020 - 2030 (USD Mn)


11.1. Overview
11.2. MEA Lithography Metrology Equipment Market by Technology, (2020-2030 USD Mn)
11.3. MEA Lithography Metrology Equipment Market by Product, (2020-2030 USD Mn)
11.4. MEA Lithography Metrology Equipment Market by Application, (2020-2030 USD Mn)
11.5. Middle East and Africa Lithography Metrology Equipment Market, by Country, (2020-2030 USD Mn)
11.5.1. GCC
11.5.1.1. GCC Lithography Metrology Equipment Market by Technology, (2020-2030 USD Mn)
11.5.1.2. GCC Lithography Metrology Equipment Market by Product, (2020-2030 USD Mn)
11.5.1.3. GCC Lithography Metrology Equipment Market by Application, (2020-2030 USD Mn)
11.5.2. South Africa
11.5.2.1. South Africa Lithography Metrology Equipment Market by Technology, (2020-2030 USD Mn)
11.5.2.2. South Africa Lithography Metrology Equipment Market by Product, (2020-2030 USD Mn)
11.5.2.3. South Africa Lithography Metrology Equipment Market by Application, (2020-2030 USD Mn)
11.5.3. Rest of MEA
11.5.3.1. Rest of MEA Lithography Metrology Equipment Market by Technology, (2020-2030 USD Mn)
11.5.3.2. Rest of MEA Lithography Metrology Equipment Market by Product, (2020-2030 USD Mn)
11.5.3.3. Rest of MEA Lithography Metrology Equipment Market by Application, (2020-2030 USD Mn)

 

12. Competitive Landscape


12.1. Company Market Share Analysis, 2022
12.2. Competitive Dashboard
12.3. Competitive Benchmarking
12.4. Geographic Presence Heatmap Analysis
12.5. Company Evolution Matrix
12.5.1. Star
12.5.2. Pervasive
12.5.3. Emerging Leader
12.5.4. Participant
12.6. Strategic Analysis Heatmap Analysis
12.7. Key Developments and Growth Strategies
12.7.1. Mergers and Acquisitions
12.7.2. New Product Launch
12.7.3. Joint Ventures
12.7.4. Others

 

13. Company Profiles


13.1. ASML Holdings
13.1.1. Business Description
13.1.2. Financial Health and Budget Allocation
13.1.3. Product Positions/Portfolio
13.1.4. Recent Development
13.1.5. SWOT Analysis
13.2. Advantest
13.3. Applied Materials
13.4. Hitachi High-Technologies
13.5. KLA-Tencor
13.6. LAM Research
13.7. Plasma-Therm
13.8. Rudolph Technologies
13.9. Screen Holding
13.10. Nanometrics
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